平面光学零件光学平行度现代测试技术研究摘要 科研工作中常用到各种平行度很高的光学件，例如研究频率用的法布里——珀洛标准具必须具有二十分之一波长的平行度，因此，如何在加工过程中方便准确的测量光学件的平行度（微小楔角）不仅是光学工艺常需要解决的问题，也关系到其光学系统的光学性能和成像质量的保障。激光点光源干涉法是利用氦氖激光的良好相干性,简易地实现由被测件（例如平板玻璃）前后两表面反射而产生的两点光源干涉现象,通过测量干涉圆环中心的偏移量,间接求出被测件两表面平行差的测量方法。该方法简单易行,既使在车间条件下,也可以达到 左右的测量精度，而且对零件的形状、大小等均无严格要求，是一种高精度精准、便捷的测量方法。 关键词：平面光学零件 光学平行度 激光点光源干涉法
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Research work of parallelism often use the optical parts, such as high frequency with research fabrizio - with copper los standards must have one of parallelism of 20 wavelength, so, how in the machining process convenient accurate measurements optical pieces of parallelism (wedge) is not only a tiny optical technology often need to solve the problem, but also related to its optical properties of optical system and the imaging quality guarantee. Laser point light interference method is to use helium neon laser good coherence, easy to realize tested parts (e.g. by two surface flat glass) before and after the two light reflected by interference phenomenon, as measured by the offset of the interference rings center, indirect tested out the two surface parallel sent a measurement methods. This method is simple, even in the workshop conditions, also can achieve the measurement accuracy, but also about the shape, size of parts are no strict requirement, is a precise and convenient high-precision measurements. 楼主，这个的确是准确的翻译，有正确的语法和短语。